Resistive switching characteristics of CMOS embedded HfO2-based 1T1R cells

Autor: Mindaugas Lukosius, Malgorzata Sowinska, T. Bertaud, Ch. Walczyk, Bernd Tillack, Ch. Wenger, Mirko Fraschke, Damian Walczyk, Thomas Schroeder
Rok vydání: 2011
Předmět:
Zdroj: Microelectronic Engineering. 88:1133-1135
ISSN: 0167-9317
Popis: This work addresses a 1T1R RRAM architecture, which allows for the precise and reliable control of the forming/set current by using an access transistor. The 1T1R devices were fabricated in a modified [email protected] CMOS technology. The memory cells show stable resistive switching in dc as well as pulse-induced mode with an endurance of 10^3 and 10^2cycles, respectively. The variation of pulse widths as a function of amplitudes in 1R devices confirmed the set process distribution over a wide range of pulse widths ([email protected]), whereas the reset process variation is confined ([email protected]).
Databáze: OpenAIRE