Design Route of the MEMS Accelerometer Optimized by the Functional Parameters Aimed to Ensure a Self-Calibration

Autor:	A.S. Timoshenkov, M.S. Golovinsky, N.E. Korobova, S.P. Timoshenkov, S.A. Anchutin, A.S. Shalimov, V.V. Kalugin
Rok vydání:	2017
Předmět:	Microelectromechanical systems Control and Systems Engineering Computer science Calibration (statistics) Electrical and Electronic Engineering Accelerometer Automotive engineering
Zdroj:	Nano- i Mikrosistemnaya Tehnika. 19:707-713
ISSN:	1813-8586
DOI:	10.17587/nmst.19.707-713
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::e1ed94adf4af6e6af38819611bae450b https://doi.org/10.17587/nmst.19.707-713 Zobrazit plný text záznamu