Growth of single-crystal diamond by microwave plasma CVD with high precursor utilization using cyclic gas injection and control of carbonaceous species content with optical emission spectroscopy

Autor:	Yicun Li, Bing Dai, V.G. Ralchenko, Jilei Lyu, Xiaobin Hao, Jiwen Zhao, Sen Zhang, Kang Liu, Jiecai Han, A.P. Bolshakov, Jiaqi Zhu
Rok vydání:	2022
Předmět:	Condensed Matter Physics Instrumentation Surfaces Coatings and Films
Zdroj:	Vacuum. 206:111529
ISSN:	0042-207X
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::e1ed7442abf69aee12487c028cb787f4 https://doi.org/10.1016/j.vacuum.2022.111529 Zobrazit plný text záznamu Full Text from ScienceDirect