A new two‐dimensional particle detector for a toroidal electrostatic analyzer

Autor:	Matthew Copel, R. Koudijs, Rudolf M. Tromp, Mark C. Reuter, J. Speidell, M. Horn-von Hoegen
Rok vydání:	1991
Předmět:	Range (particle radiation) Materials science Spectrometer Physics::Plasma Physics Physics::Instrumentation and Detectors Scattering Detector Resolution (electron density) Atomic physics Electrostatic analyzer Instrumentation Particle detector Ion
Zdroj:	Review of Scientific Instruments. 62:2679-2683
ISSN:	1089-7623 0034-6748
DOI:	10.1063/1.1142199
Popis:	We describe a new two‐dimensional detector for the detection of ions scattered from a solid target, analyzed in energy and scattering angle by a toroidal electrostatic analyzer. The detector resolves the scattering angle with a resolution of 0.4° over a range of 25°, and the ion energy with a resolution of 120 eV over a range of 2000 eV, at 100 keV ion energy. The energy resolution of the spectrometer was improved with a factor 4 relative to its previous performance with a one‐dimensional scattering angle detector, while−at the same time−the dose efficiency (count/μC) was improved by a factor 5–10.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::e1d3b8002974a5d85fa4867ee7fd0edf https://doi.org/10.1063/1.1142199 Zobrazit plný text záznamu