| Autor: |
Hyeon-Joo Song, Jun-Bo Yoon, Jae-Young Yoo, Min-Seung Jo, Kwang-Wook Choi, Jae-Shin Lee, Min-Ho Seo |
| Rok vydání: |
2019 |
| Předmět: |
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| Zdroj: |
2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII). |
| DOI: |
10.1109/transducers.2019.8808455 |
| Popis: |
A major obstacle to the industrial application of nanowires is difficulty in fabricating nanowire devices with uniform performance. In this study, we newly developed a wafer-level uniformly size-controlled nanowire fabrication method for reliable demonstration of a high-yield, uniform nano-sensor device. We show that the developed fabrication method can be used to simply fabricate remarkably small nanowires (sub-50 nm) with a wide material selection. Importantly, the fabricated nanowires have ultra-high size uniformity on the 4-inch wafer. Finally, we demonstrate nanowire-based hydrogen (H 2 ) sensors using the developed method. Owing to the geometric uniformity of the fabricated nanowires, the sensor devices achieved highly uniform sensitivity of 10.9±0.5 % at a 2% H 2 concentration. |
| Databáze: |
OpenAIRE |
| Externí odkaz: |
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