Low energy ion trapping and gas release from nickel single crystals

Autor: G. Carter, D.G. Armour, DJ Reed
Rok vydání: 1974
Předmět:
Zdroj: Vacuum. 24:455-461
ISSN: 0042-207X
DOI: 10.1016/0042-207x(74)90004-9
Popis: A study has been made of the thermal release of helium implanted into randomly oriented nickel single crystals at 1 keV. The effects of dose, dose rate and implant temperature on post-bombardment gas evolution rate spectra have been investigated. On the basis of the spectra obtained a model for low energy helium trapping is suggested which is consistent with previously observed dose dependent trapping probability and explains the almost total inhibition of gas trapping observed at implant temperatures in excess of 450°C. The model is also used to explain the observed evolution rate maxima associated with release from small gas bubbles formed during annealing. The ultimate formation of the suggested gas bubbles has been shown to be strongly dependent on incident dose and co-incident with enhanced gas trapping.
Databáze: OpenAIRE