Effects of Zr content and annealing on ferroelectricity of as-grown crystalline Hf1-xZrxO2 thin films using Hf[Cp(NMe2)3] and Zr[Cp(NMe2)3] precursors via atomic layer deposition

Autor:	Youkyoung Oh, Hyo-Bae Kim, Seung Won Lee, Min Ji Jeong, Tae Joo Park, Ji-Hoon Ahn
Rok vydání:	2022
Předmět:	Process Chemistry and Technology Materials Chemistry Ceramics and Composites Surfaces Coatings and Films Electronic Optical and Magnetic Materials
Zdroj:	Ceramics International. 48:25661-25665
ISSN:	0272-8842
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::e179b8308410f1bae7fae247ea851d70 https://doi.org/10.1016/j.ceramint.2022.05.397 Zobrazit plný text záznamu Full Text from ScienceDirect