Improving silicon-photonics inverse-design printability by leveraging SEM contours for advanced Optical Proximity Correction techniques

Autor:	Youssef Drissi, Werner Gillijns, Sebastien Lardenois, Peter Verheyen, Guy Lepage, Mahmoud Mohsen, Maxence Delorme
Rok vydání:	2022
Zdroj:	Advanced Fabrication Technologies for Micro/Nano Optics and Photonics XV.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::e161a5aa59933657a1b6dbbeaaa11ab4 https://doi.org/10.1117/12.2609092 Zobrazit plný text záznamu