| Autor: |
Deming Shu, Jorg Maser, R. Garrett, I. Gentle, K. Nugent, S. Wilkins |
| Rok vydání: |
2010 |
| Předmět: |
|
| Zdroj: |
AIP Conference Proceedings. |
| ISSN: |
0094-243X |
| DOI: |
10.1063/1.3463237 |
| Popis: |
To use x‐ray optics with nanometer resolution limit, scanning x‐ray nanoprobes with corresponding mechanical positioning capability need to be designed. In particular, positioning stages with both sub‐nanometer resolution and a positioning/scanning range of several millimeters are required. Based on our design of precision weak‐link stages with interferometric encoders for the Center for Nanoscale Materials (CNM) hard x‐ray nanoprobe at the Advanced Photon Source (APS) Sector 26, we have developed a new two‐dimensional (2‐D) weak‐link stage system for nanopositioning of a specimen holder. This system provides sub‐nanometer resolution, coupled with sub‐nanometer metrology at a travel range of several millimeters. The 2‐D weak‐link stage system is designed with high structure stiffness using laminar overconstrained weak‐link mechanisms [4–6]. In this paper we present the study of a linear precision weak‐link stage system with sub‐centimeter travel range and sub‐nanometer positioning resolution. Design of a rotary weak‐link stage system with 10‐nrad resolution and 10‐degree‐level travel range is also discussed in this paper. |
| Databáze: |
OpenAIRE |
| Externí odkaz: |
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