Influence of oxidation on the structural and mechanical properties of TiAlSiN coatings synthesized by multi-plasma immersion ion implantation and deposition
| Autor: | Xiuheng Wang, Zhiwen Xie, Lishuan Wang, Li Huang, Yang Lu, J.C. Yan |
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| Rok vydání: | 2012 |
| Předmět: |
Nuclear and High Energy Physics
Nanocomposite Materials science Scanning electron microscope Metallurgy chemistry.chemical_element engineering.material Plasma-immersion ion implantation Coating Chemical engineering X-ray photoelectron spectroscopy chemistry engineering High-resolution transmission electron microscopy Tin Instrumentation Layer (electronics) |
| Zdroj: | Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms. 271:1-5 |
| ISSN: | 0168-583X |
| DOI: | 10.1016/j.nimb.2011.10.011 |
| Popis: | TiAlSiN nanocomposite and TiN coatings were synthesized by multi-plasma immersion ion implantation and deposition. The structure, hardness and tribological properties of both coatings oxidized at 800 °C were characterized by X-ray diffraction, scanning electron microscopy, X-ray photoelectron spectroscopy, high resolution transmission electron microscopy, nano-indentation and ball-on-disk tests. The results show that the TiN coating was oxidized almost completely after air exposure at 800 °C. Except for a thin oxidized layer formed on the top surface containing TiO 2 , Al 2 O 3 and SiO 2 , the cross section of the TiAlSiN coating remained in its original configuration after oxidation. Analysis revealed that the oxidized layer remained in a similar structure as before oxidation, which is TiO 2 nanocrystals embedded in an amorphous SiO 2 matrix. The hardness results show that the TiAlSiN coating after oxidation maintained a similar hardness as the un-oxidized coating. In addition, the TiAlSiN coating also showed a high wear resistance at 800 °C. |
| Databáze: | OpenAIRE |
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