Opto-Mechanical Ultrasound Sensor Based on Sensitive Silicon-Photonic Split Rib-Type Waveguide

Autor: Md. Mahmud-Ul-Hasan, Simone Severi, Xavier Rottenberg, W.J. Westerveld, Roelof Jansen, Véronique Rochus
Rok vydání: 2019
Předmět:
Zdroj: 2019 Conference on Lasers and Electro-Optics Europe & European Quantum Electronics Conference (CLEO/Europe-EQEC).
Popis: Ultrasonography is widely used in (bio-)medical imaging and especially photo-acoustic imaging is rapidly advancing towards new applications. Future applications require a matrix of small (λ/2) and sensitive ultrasound sensors with read-out through a thin and flexible cable [1]. We target ∼15 MHz ultrasound for e.g. catheter-based intravascular imaging or for freely-moving mouse brain imaging. Integrated optical sensors have good prospects: small and sensitive sensors [2,3], wafer-scale fabrication, and matrix read-out via single optical fiber using on-chip wavelength-division multiplexing (WDM) [4]. Polymer waveguide ring-resonator showed good sensitivity and bandwidth [2] but large device footprint hampers WDM. Silicon photonic waveguides are less susceptible to direct ultrasound but opto-mechanical ultrasound sensors (OMUS), with the photonic resonator integrated in an acoustically resonant membrane, showed high sensitivity [3].
Databáze: OpenAIRE