Optically Actuated MEMS Deformable Mirror Device

Autor:	Charels Woods, Bahareh Haji-saeed, Jed Khoury, Kenneth Vaccaro, Arnold Kiefer, Jarrett H. Vella, Andrew Davis, John Kierstead
Rok vydání:	2012
Předmět:	Microelectromechanical systems Fabrication Materials science business.industry Photodetector Substrate (printing) Deformable mirror Computer Science::Other law.invention Optics law Optoelectronics Thin film Resistor business Adaptive optics
Zdroj:	Frontiers in Optics 2012/Laser Science XXVIII.
DOI:	10.1364/fio.2012.fw5e.3
Popis:	We propose a new design, fabrication procedures and the operating theory for a very low-power optically actuated deformable mirror device. The deformable mirror consists of an array of AlGaAs PIN photo detectors bonded onto a transparent substrate, a thin film resistor, and a suspended membrane
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::e10fd715dc61204511d6d6efe6d54022 https://doi.org/10.1364/fio.2012.fw5e.3 Zobrazit plný text záznamu