Popis: |
We introduce the Network Photonics' Crosswave as the first commercially-available, MEMS-based wavelength selective switch. The CrossWave combines the functionality of signal demultiplexing, switching and re-multiplexing in a single all-optical operation using a dispersive element and 1-D MEMS. 1-D MEMS, where micronurrors are configured in a single array with a single mirror per wavelength, are fabricated in a standard surface micromachining process. In this paper we present three generations of micromirror designs. With proper design optimization and process improvements we have demonstrated exceptional mirror flatness ( |