A VHF temperature compensated lithium niobate-on-oxide resonator with Q > 3900 for low phase noise oscillators
| Autor: | Gayathri Pillai, Sheng-Shian Li, Chun-You Liu, Grace W. Fang, Ming-Huang Li |
|---|---|
| Rok vydání: | 2018 |
| Předmět: |
Materials science
business.industry 010401 analytical chemistry Lithium niobate chemistry.chemical_element dBc 020206 networking & telecommunications 02 engineering and technology 01 natural sciences Temperature measurement 0104 chemical sciences Phase-locked loop Resonator chemistry.chemical_compound chemistry Phase noise 0202 electrical engineering electronic engineering information engineering Optoelectronics Lithium business Temperature coefficient |
| Zdroj: | 2018 IEEE Micro Electro Mechanical Systems (MEMS). |
| DOI: | 10.1109/memsys.2018.8346657 |
| Popis: | This work reports a 40-MHz lithium niobate-on-oxide (LN/S1O2) micromechanical resonator which simultaneously features a compensated temperature coefficient of frequency (TCf f of −13 ppm/°C and a record high Q > 3,900 in vacuum (Q > 1,600 in air) for low phase noise oscillators. A high-quality 0.7 μm X-cut LN thin film atop a 2 μm SiO 2 compensation layer was used to form the body of the proposed resonator based on a quasi-fundamental shear horizontal (Q-SH0) plate wave with acoustic propagation in 170° rotated from the Y-axis. The proposed LN-SiO 2 resonator is suspended through 5-μm narrow-width supporting beams to mitigate the acoustic energy loss to the substrate, thus exhibiting a best-case Q of 3,900 in vacuum with k eff 2 > 3.8% (FOM = k eff 2 ×Q > 148). The closed-loop oscillator was demonstrated with a commercial phase-locked loop (Zurich HF2LI PLL) under a loop bandwidth of 90 kHz. Measured phase noise for the 40-MHz LN-S1O 2 Q-SH 0 wave oscillator at 1 kHz and 10 kHz offsets is −110 dBc/Hz and −123 dBc/Hz, respectively, with a minimal bias instability of only 6.2 ppb. |
| Databáze: | OpenAIRE |
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