Modeling and performance of uncoated microcantilever-based chemical sensors
| Autor: | Claude Lucat, Isabelle Dufour, Benjamin Caillard, Francis Menil, Sébastien Tétin, Hélène Debéda, Claude Pellet |
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| Rok vydání: | 2010 |
| Předmět: |
Silicon
Physics::Instrumentation and Detectors Chemistry business.industry Metals and Alloys Response time chemistry.chemical_element Nanotechnology engineering.material Condensed Matter Physics Signal Computer Science::Other Surfaces Coatings and Films Electronic Optical and Magnetic Materials Viscosity Coating Materials Chemistry engineering Optoelectronics Relative variation Sensitivity (control systems) Electrical and Electronic Engineering Selectivity business Instrumentation |
| Zdroj: | Sensors and Actuators B: Chemical. 143:555-560 |
| ISSN: | 0925-4005 |
| DOI: | 10.1016/j.snb.2009.09.062 |
| Popis: | Chemical sensors based on vibrating silicon microcantilevers without sensitive coating are investigated herein. The sensor signal is the relative variation of the microcantilever resonant frequency which depends on both the viscosity and the density of the fluid surrounding the microcantilever. This principle has been applied to the detection of binary gas mixtures. Experimental data for He/N2 and CO2/N2 environments are presented and compared to results of theoretical modeling. The advantages of such a gas sensor based on changes of physical properties are discussed (response time, sensitivity, selectivity, stability). |
| Databáze: | OpenAIRE |
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