Datamining for yield
| Autor: | Trejo Rust, David McCarthy, Min Dai, Michael Brodfuehrer, Lingjie Wang, Colleen Meagher, Bruce Dyer, Raymond Van Roijen, Michael D. Steigerwalt, Javier Ayala, Gasner Barthold, Jeffery B. Maxson, Randal Bakken |
|---|---|
| Rok vydání: | 2017 |
| Předmět: |
0209 industrial biotechnology
Yield (engineering) Materials science Process (computing) Hardware_PERFORMANCEANDRELIABILITY 02 engineering and technology Root cause Processes of change computer.software_genre Signal 020901 industrial engineering & automation Hardware_INTEGRATEDCIRCUITS Deposition (phase transition) Wafer Data mining Metal gate computer |
| Zdroj: | 2017 28th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC). |
| DOI: | 10.1109/asmc.2017.7969251 |
| Popis: | A small but persistent signal in wafer slot order was observed at functional test, affecting logic yield. Through wafer slot Randomization at several operations in the route a process step within high-k metal gate formation was suspected to be causing the degrade, but conventional approaches did not reveal the root cause. By combining datamining with a thorough analysis of sector and electrical data we identified a defect mechanism exacerbated by the delay between gate metal and polysilicon deposition. By applying a process change, we addressed the issue and achieved yield improvement. |
| Databáze: | OpenAIRE |
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