Impact of Film Morphology on Chemical Mechanical Polishing of Tungsten
| Autor: | Ingemar Carlsson, Bogdan Swedek, Fritz Redeker, Katrina Mikhaylich, Tomohiko Kitajima, Brian J. Brown, Kun Xu, Sidney P. Huey, Shou-sung Chang, Wen-chiang Tu, Hassan G. Iravani, Shih-Haur Shen, Tzu-Yu Liu, Jason G. Fung |
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| Rok vydání: | 2016 |
| Předmět: |
010302 applied physics
Morphology (linguistics) Materials science Metallurgy chemistry.chemical_element 02 engineering and technology Tungsten 021001 nanoscience & nanotechnology 01 natural sciences Electronic Optical and Magnetic Materials chemistry Chemical-mechanical planarization 0103 physical sciences 0210 nano-technology |
| Zdroj: | ECS Journal of Solid State Science and Technology. 5:P361-P367 |
| ISSN: | 2162-8777 2162-8769 |
| DOI: | 10.1149/2.0371606jss |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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