Surface analysis of glass in the electronics industry

Autor:	R. G. Gossink, B. M. J. Smets
Rok vydání:	1983
Předmět:	Surface (mathematics) Materials science X-ray photoelectron spectroscopy Clinical Biochemistry General Materials Science Nanotechnology General Medicine Surface layer Electronics Sample (graphics) Analytical Chemistry
Zdroj:	Fresenius' Zeitschrift für analytische Chemie. 314:285-288
ISSN:	0016-1152
DOI:	10.1007/bf00516821
Popis:	The surface analysis of glass as used in the electronics industry is critically reviewed. Analysis will only be successful when it is possible to reduce the sample charging to a low and stable value. XPS and SIMS appear to be the methods of choice for analysis of the outermost surface layer of the glass and the first micrometers beneath the surface, respectively.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::dff5ec87bf19a9fb77e297a10956aced https://doi.org/10.1007/bf00516821 Zobrazit plný text záznamu Full text from SpringerLink