High performance thin-film lithium niobate MZ modulator ready for massive production

Autor:	Heng Li, Quanan Chen, Ye Liu, Yongqian Tang, Qiaoyin Lu, Mingzhi Lu, Weihua Guo
Rok vydání:	2022
Zdroj:	Optical Fiber Communication Conference (OFC) 2022.
DOI:	10.1364/ofc.2022.m2d.5
Popis:	Through photolithography we fabricated high-performance thin-film lithium niobate modulators on full 4-inch wafers with low VπL, wide bandwidth and low insertion loss. The waveguide loss is one of the lowest among similar work.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::dfeabb197867e79fd2d2428ac6ea4608 https://doi.org/10.1364/ofc.2022.m2d.5 Zobrazit plný text záznamu