| Autor: |
Tsubasa Watanabe, Haruyoshi Toyoda, Yu Takiguchi, Yoshiyuki Ohtake, Hiroshi Tanaka, Hirokazu Asaine, Naohisa Mukozaka |
| Rok vydání: |
2021 |
| Předmět: |
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| Zdroj: |
Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXVI. |
| DOI: |
10.1117/12.2577330 |
| Popis: |
In this study, we developed a liquid-crystal spatial light modulator with high laser power capacity for industrial ultrafast pulse lasers to demonstrate innovative manufacturing and fabrication techniques using a cyber-physical system. The incident phase performance characteristic of this device was obtained with a 60 W, 1035 nm ultrafast laser. This research work will help to accelerate the use of liquid crystal spatial light modulators for high-precision laser processing of resistant materials and high-throughput for additive manufacturing. |
| Databáze: |
OpenAIRE |
| Externí odkaz: |
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