Soft Baking Effect on Lithographic Performance by Positive Tone Photosensitive Polyimide

Autor:	Tomoyuki Yuba, Jae Hyun Kim, Ryoji Okuda, Masao Tomikawa
Rok vydání:	2010
Předmět:	Tone (musical instrument) Materials science Polymers and Plastics Photosensitivity Organic Chemistry Materials Chemistry Composite material Residual solvent Lithography Polyimide
Zdroj:	Journal of Photopolymer Science and Technology. 23:775-779
ISSN:	1349-6336 0914-9244
DOI:	10.2494/photopolymer.23.775
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::dfaa002a91e3b80508df21e2a408027f https://doi.org/10.2494/photopolymer.23.775 Zobrazit plný text záznamu