Determining the optical properties of a mixed-metal oxide film, Co3−x−yCrxFeyO4, with spectroscopic ellipsometry and atomic force microscopy

Autor: M.F. Tabet, P. Ruzakowski Athey, Frank K. Urban
Rok vydání: 1997
Předmět:
Zdroj: Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films. 15:998-1006
ISSN: 1520-8559
0734-2101
DOI: 10.1116/1.580794
Popis: The optical properties of a mixed-metal oxide thin film from the Co3−x−yCrxFeyO4 family has been determined from combined analysis of ellipsometry, atomic force microscopy, and transmittance measurements. These types of films are useful as solar absorbing films on a variety of float glass substrates to lower the solar heat gain admitted through a glass pane in a window, skylight, or door. A commercial product with a film composition in this family is sold under its registered trademark SOLARCOOL® glass. Each constituent metal oxide film was analyzed with variable angle of incidence spectroscopic ellipsometry and transmittance (T) measurements to determine their optical constants and film thickness. Surface roughness was measured with atomic force microscopy and included in the optical model as a known variable. The oxide films were optically modeled with a bulk layer and a known surface roughness layer. The mixed-metal oxide film was optically modeled with an effective medium approximation layer consistin...
Databáze: OpenAIRE