Transfer printing approach to all-carbon nanoelectronics
Autor: | Vinod K. Sangwan, Adrian Southard, Michael S. Fuhrer, Ellen D. Williams, V. W. Ballarotto, Daniel R. Hines, T. L. Moore |
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Rok vydání: | 2011 |
Předmět: |
Materials science
business.industry Nanotechnology Carbon nanotube Chemical vapor deposition Condensed Matter Physics Atomic and Molecular Physics and Optics Surfaces Coatings and Films Electronic Optical and Magnetic Materials law.invention chemistry.chemical_compound Semiconductor Nanoelectronics chemistry law Transfer printing Thin-film transistor Polyethylene terephthalate Electrical and Electronic Engineering business Sheet resistance |
Zdroj: | Microelectronic Engineering. 88:3150-3154 |
ISSN: | 0167-9317 |
Popis: | Transfer printing methods are used to pattern and assemble monolithic carbon nanotube (CNT) thin-film transistors on large-area transparent, flexible substrates. Airbrushed CNT thin-films with sheet resistance [email protected]^-^1 at 80% transparency were used as electrodes, and high quality chemical vapor deposition (CVD)-grown CNT networks were used as the semiconductor component. Transfer printing was used to pre-pattern and assemble thin film transistors on polyethylene terephthalate (PET) substrates which incorporated Al"2O"3/poly-methylmethacrylate (PMMA) dielectric bi-layer. CNT-based ambipolar devices exhibit field-effect mobility in range 1-33cm^2/Vs and on/off ratio ~10^3, comparable to the control devices fabricated using Au as the electrode material. |
Databáze: | OpenAIRE |
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