Effect of modulation ratio on microstructure and tribological properties of TiAlN/TiAlCN multilayer coatings prepared by multi-excitation source plasma

Autor: Bing Zhou, Yiming Wang, Zhubo Liu, Jiaqi Zhi, Hui Sun, Yongsheng Wang, Yanxia Wu, Hongjun Hei, Shengwang Yu
Rok vydání: 2023
Předmět:
Zdroj: Vacuum. 211:111917
ISSN: 0042-207X
DOI: 10.1016/j.vacuum.2023.111917
Databáze: OpenAIRE