Growth parameter effect in superconducting YBa2Cu4O8 thin films by d.c. magnetron sputtering

Autor:	Tseung-Yuen Tseng, W. R. Chang, S. C. Wu, H. T. Hsu, F. H. Chen
Rok vydání:	1994
Předmět:	Superconductivity Materials science Argon Mechanical Engineering Analytical chemistry chemistry.chemical_element Substrate (electronics) Sputter deposition chemistry Mechanics of Materials Deposition (phase transition) General Materials Science Total pressure Thin film Ambient pressure
Zdroj:	Journal of Materials Science. 29:5593-5598
ISSN:	1573-4803 0022-2461
DOI:	10.1007/bf00349952
Popis:	High- Tc YBa2Cu4O8 (124) thin films have been made by d.c. magnetron sputtering deposition on (100) MgO substrates. The effect of several processing variables, including the ratio of oxygen to argon, total pressure, and substrate temperature, on the superconducting properties of the thin films, were systematically investigated. The as-prepared films annealed in flowing oxygen at 800°C for 4 h under ambient pressure obtained nearly phase-pure 124 and exhibited superconducting onset transition at 75 K.
Databáze:	OpenAIRE
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