Development of three-dimensional medium-energy ion scattering using a large solid angle detector

Autor:	Takane Kobayashi
Rok vydání:	2006
Předmět:	Nuclear and High Energy Physics Range (particle radiation) Yield (engineering) Scattering business.industry Chemistry Detector Solid angle Blocking (statistics) Ion Optics Elemental analysis business Instrumentation
Zdroj:	Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms. 249:266-269
ISSN:	0168-583X
DOI:	10.1016/j.nimb.2006.04.066
Popis:	Three-dimensional medium-energy ion scattering (3D-MEIS) equipped with a large detector has been developed for crystallographic structural and elemental analysis of materials. Backscattering experiments have been made for a Si(0 0 1) sample at the geometry that the range of the scattering angle is as large as ±17.5°. Clear blocking shadows were observed together with belt-like shadow aggregations. A low yield spot not relevant to a blocking cone appears, but it can be excluded from the blocking pattern by changing the detection geometry. The results indicate that 3D-MEIS using a large solid angle detector is promising for crystallographic material analysis.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::df39b90b5834d54b865f723681f3ccf1 https://doi.org/10.1016/j.nimb.2006.04.066 Zobrazit plný text záznamu Full Text from ScienceDirect