Laser- and Heavy Ion-Induced Charge Collection in Bulk FinFETs
| Autor: | Robert A. Reed, Dimitri Linten, N. D. Pate, G. Vizkelethy, D. McMorrow, En Xia Zhang, Eddy Simoen, Alessio Griffoni, F. El-Mamouni, Ronald D. Schrimpf, Nicholas C. Hooten, Jeffrey H. Warner, Kenneth F. Galloway, Cor Claeys |
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| Rok vydání: | 2011 |
| Předmět: |
Nuclear and High Energy Physics
Materials science Charge (physics) Substrate (electronics) Electrostatic induction Laser Fin (extended surface) law.invention Nuclear Energy and Engineering law MOSFET Electrical and Electronic Engineering Diffusion (business) Atomic physics Absorption (electromagnetic radiation) |
| Zdroj: | IEEE Transactions on Nuclear Science. 58:2563-2569 |
| ISSN: | 0018-9499 |
| DOI: | 10.1109/tns.2011.2171994 |
| Popis: | Through-wafer two-photon absorption laser experiments were performed on bulk FinFETs. Transients show distinct signatures for charge collection from drift and diffusion, demonstrating the contribution of charge generated in the substrate to the charge collection process. This result was validated through heavy ion testing on more advanced bulk FinFETs with fin widths as narrow as 5 nm. The drain region dominates the charge collection, with as much as 45 fC of charge collected in the drain region. |
| Databáze: | OpenAIRE |
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