Influence of incident light angles on mosaic grating errors in optical path for grating replication and mosaic
| Autor: | 丛 敏 Cong Min, 于海利 Yu Haili, 糜小涛 Mi Xiao-tao, 齐向东 Qi Xiangdong, 卢禹先 Lu Yuxian, 李晓天 Li Xiaotian |
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| Rok vydání: | 2017 |
| Předmět: |
Physics
business.industry 02 engineering and technology Replication (microscopy) Grating 021001 nanoscience & nanotechnology 01 natural sciences Ray Atomic and Molecular Physics and Optics Electronic Optical and Magnetic Materials 010309 optics Optics Optical path 0103 physical sciences 0210 nano-technology business |
| Zdroj: | Optics and Precision Engineering. 25:3027-3033 |
| ISSN: | 1004-924X |
| DOI: | 10.3788/ope.20172512.3027 |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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