Off-specular reflectivity study of sputter-deposition of platinum during growth
| Autor: | K.G. Huang, R. T. Kampwirth, Hoydoo You |
|---|---|
| Rok vydání: | 1996 |
| Předmět: |
Materials science
Silicon Scattering business.industry chemistry.chemical_element Crystal growth Sputter deposition Island growth Condensed Matter Physics Molecular physics Electronic Optical and Magnetic Materials Condensed Matter::Materials Science Optics chemistry Sputtering Specular reflection Electrical and Electronic Engineering Thin film business |
| Zdroj: | Physica B: Condensed Matter. 221:77-85 |
| ISSN: | 0921-4526 |
| DOI: | 10.1016/0921-4526(95)00908-6 |
| Popis: | A series of off-specular diffuse scattering measurements were performed by scanning the detector parallel to the sample surface during growth of platinum films on polished silicon substrates. During early stage of island growth, we observe a halo of diffuse scattering around the specular reflection which is similar in origin to Henzler's ring (P. Hahn, J. Clabes and M. Henzler, J. Appl. Phys. 51 (1980) 2079). A model of random islands was developed to explain the halo of diffuse scattering. During late growth, the film surface was consistent with a partially self-affine surface. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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