Optimization of via etching process of LTPS TFT interlayer dielectric

Autor:	彭涛 Peng Tao, 郭太良 Guo Tai-liang, 陈丽雯 Chen Li-wen, 文亮 Wen Liang, 周秀峰 Zhou Xiu-feng, 叶芸 Ye Yun
Rok vydání:	2016
Předmět:	Materials science business.industry Etching (microfabrication) Thin-film transistor Scientific method Signal Processing Optoelectronics Dielectric business Instrumentation Electronic Optical and Magnetic Materials
Zdroj:	Chinese Journal of Liquid Crystals and Displays. 31:363-369
ISSN:	1007-2780
DOI:	10.3788/yjyxs20163104.0363
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::decdd7c16999e168295990c6310ffffc https://doi.org/10.3788/yjyxs20163104.0363 Zobrazit plný text záznamu