Statistical Behavioral Models of Silicon Ring Resonators at a Commercial CMOS Foundry

Autor:	Raymond G. Beausoleil, Jared Hulme, Charles Baudot, Dave Kielpinski, Peng Sun, M. Ashkan Seyedi, Marco Fiorentino, Thomas Van Vaerenbergh, Frederic Boeuf, Nathalie Vulliet, Jinsoo Rhim
Rok vydání:	2019
Předmět:	Silicon Computer science business.industry chemistry.chemical_element Optical ring resonators 02 engineering and technology 021001 nanoscience & nanotechnology 01 natural sciences Metrology law.invention 010309 optics Resonator CMOS chemistry Hardware_GENERAL law 0103 physical sciences Reflection (physics) Electronic engineering System integration Foundry 0210 nano-technology business
Zdroj:	2019 IEEE Optical Interconnects Conference (OI).
DOI:	10.1109/oic.2019.8714482
Popis:	We report on statistical behavioral models of silicon ring resonators in a commercial CMOS foundry. Process variability is inferred from optical tests and validated by inline metrology data. Significant reflection is observed on many designs, and the impact of reflection on system integration are discussed.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::de98604a257e8b6eb991bc5c526069d1 https://doi.org/10.1109/oic.2019.8714482 Zobrazit plný text záznamu