On Enhancing the Sensitivity of Resonant Thermometers Based on Parametric Modulation

Autor:	Liang-Cheng Tu, Yuan Wang, Jingqian Xi, Huafeng Liu, Fangzheng Li, Chun Zhao, Lu Gao, Chengxin Li
Rok vydání:	2021
Předmět:	Physics Microelectromechanical systems Normal mode Mechanical Engineering Acoustics Thermometer Mode (statistics) Point (geometry) Sensitivity (control systems) Electrical and Electronic Engineering Noise floor Beam (structure)
Zdroj:	Journal of Microelectromechanical Systems. 30:539-549
ISSN:	1941-0158 1057-7157
Popis:	In this paper, a new approach for enhancing the temperature sensitivity of a resonant MEMS thermometer, based on parametric modulation, is proposed. By periodically modulating the effective stiffness of a standard clamped-clamped beam (C-C beam), which is used as a proof-of-concept resonant MEMS thermometer, it is possible to create a virtual energy coupling between two fundamental modes of vibration. Through this energy transfer link, one particular mode (ideally high sensitivity) can be transferred to the vicinity of another mode (ideally low noise), thus creating an operating region where both increased sensitivity and low noise can be achieved. As a starting point, a sensitivity enhancement of up to 126% can be achieved in this particular study, while not deteriorating the readout noise floor. A noise floor of 19.7 $\mu $ K/Hz 1/2 has been achieved. Potentially, this approach could be extended to other structures, or be used to decrease sensitivity to temperature fluctuations as well. [2021-0050]
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::de9721da77ee3f073f84358597c24e0c https://doi.org/10.1109/jmems.2021.3079442 Zobrazit plný text záznamu