Novel Stacked Packaging Structure Using Silica-Based PLC with Integrated Micro-Mirrors and Its Application to 8ch PD Array Module

Autor: Senichi Suzuki, Makoto Abe, Ogawa Ikuo, Yoshiyuki Doi
Rok vydání: 2005
Předmět:
Zdroj: IEICE Transactions on Electronics. :1552-1558
ISSN: 1745-1353
0916-8524
DOI: 10.1093/ietele/e88-c.8.1552
Popis: We propose and demonstrate a new stacked packaging structure using silica-based planar lightwave circuits (PLCs) with integrated micro-mirrors. This structure enables us to integrate active devices on PLCs with certain flexibility as regards optical coupling design and device selection. To achieve this, we developed an integrated micromirror with an accurate reflection angle and shielding structures to prevent crosstalk, and successfully demonstrated an 8-channel photodiode array module with excellent characteristics consisting of a high responsivity of > 0.85 A/W and a low crosstalk of < -65 dB.
Databáze: OpenAIRE