Novel Stacked Packaging Structure Using Silica-Based PLC with Integrated Micro-Mirrors and Its Application to 8ch PD Array Module
Autor: | Senichi Suzuki, Makoto Abe, Ogawa Ikuo, Yoshiyuki Doi |
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Rok vydání: | 2005 |
Předmět: |
Engineering
business.industry Electronic packaging Electronic Optical and Magnetic Materials Photodiode law.invention Responsivity Planar Hybrid integrated circuit law Electromagnetic shielding Electronic engineering Electrical and Electronic Engineering business Reflection (computer graphics) Electronic circuit |
Zdroj: | IEICE Transactions on Electronics. :1552-1558 |
ISSN: | 1745-1353 0916-8524 |
DOI: | 10.1093/ietele/e88-c.8.1552 |
Popis: | We propose and demonstrate a new stacked packaging structure using silica-based planar lightwave circuits (PLCs) with integrated micro-mirrors. This structure enables us to integrate active devices on PLCs with certain flexibility as regards optical coupling design and device selection. To achieve this, we developed an integrated micromirror with an accurate reflection angle and shielding structures to prevent crosstalk, and successfully demonstrated an 8-channel photodiode array module with excellent characteristics consisting of a high responsivity of > 0.85 A/W and a low crosstalk of < -65 dB. |
Databáze: | OpenAIRE |
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