Photoluminescent properties of porous films of tantalum silicides
Autor: | José M. Martínez-Duart, V.P. Parkhutik |
---|---|
Rok vydání: | 1995 |
Předmět: |
Materials science
Silicon Silicon dioxide Anodizing Inorganic chemistry Metals and Alloys Tantalum chemistry.chemical_element Surfaces and Interfaces Electrolyte Surfaces Coatings and Films Electronic Optical and Magnetic Materials chemistry.chemical_compound chemistry Chemical engineering Etching (microfabrication) Silicide Materials Chemistry Thin film |
Zdroj: | Thin Solid Films. 255:298-301 |
ISSN: | 0040-6090 |
DOI: | 10.1016/0040-6090(94)05614-j |
Popis: | The paper reports the first results of observing the visible photoluminescence from the surface of tantalum silicide samples subjected to electrochemical anodization in HF-containing electrolyte. It is shown that at increased concentrations of HF (more than 20%) and low current densities uniform dissolution of the silicide film takes place. A lower HF concentration (10%) yields the same effect at low current densities, whereas higher currents result in formation of a porous passive anodic layer composed of silicon dioxide with small inclusions of elemental silicon and tantalum oxide. These passive layers are efficiently luminescent. |
Databáze: | OpenAIRE |
Externí odkaz: |