Errors Analysis of Flat-Field Gratings Fabricated by EBL-NFH and Errors Compensation

Autor:	林达奎 Lin Dakui, 陈火耀 Chen Huo-yao, 刘正坤 Liu Zheng-kun, 刘颖 Liu Ying
Rok vydání:	2018
Předmět:	0301 basic medicine 030103 biophysics 03 medical and health sciences Materials science Optics Field (physics) business.industry business Atomic and Molecular Physics and Optics Electronic Optical and Magnetic Materials Compensation (engineering)
Zdroj:	Acta Optica Sinica. 38:0505003
ISSN:	0253-2239
DOI:	10.3788/aos201838.0505003
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::de8127e9f4b9e7556cf57351fe9c86eb https://doi.org/10.3788/aos201838.0505003 Zobrazit plný text záznamu