Influence of Dopants Profile on Random Dopant Fluctuation and Optimization for Bulk FinFET

Autor:	Guangxing Wan, Kunpeng Jia, Huilong Zhu, Xing Wei, Xiaogen Yin
Rok vydání:	2017
Předmět:	010302 applied physics Materials science Dopant Condensed matter physics 0103 physical sciences 01 natural sciences Electronic Optical and Magnetic Materials Random dopant fluctuation
Zdroj:	ECS Journal of Solid State Science and Technology. 6:M79-M82
ISSN:	2162-8777 2162-8769
DOI:	10.1149/2.0211707jss
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::de791fde2b2e0adf4e9921a2718dc3b5 https://doi.org/10.1149/2.0211707jss Zobrazit plný text záznamu