Preparation and properties of in-situ sputtered YBCO films

Autor:	Alan M. Kadin, P. H. Ballentine, J. P. Allen, D. S. Mallory
Rok vydání:	1991
Předmět:	In situ Microwave surface resistance Materials science business.industry Metals and Alloys Sputter deposition Condensed Matter Physics Ion Shield Materials Chemistry Ceramics and Composites Optoelectronics Electrical and Electronic Engineering business
Zdroj:	Superconductor Science and Technology. 4:S175-S177
ISSN:	1361-6668 0953-2048
DOI:	10.1088/0953-2048/4/1s/044
Popis:	The authors have used RF magnetron sputtering from a large near-stoichiometric YBCO target onto heated substrates to produce c-axis oriented films with Tc=87 K in situ, without a subsequent post-anneal. Effects of negative ion bombardment were avoided by placing substrates above the center of the target, directly above a grounded ion shield. Film properties are rather sensitive to small changes in target composition. At 66 K, critical currents of optimum films are greater than 1MA/cm2, and microwave surface resistance at 2 GHz is less than 10 m Omega .
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::de6565fbafbfa10459c49d681597b8b0 https://doi.org/10.1088/0953-2048/4/1s/044 Zobrazit plný text záznamu