Influence of annealing on electronic properties of thin AlN films deposited by magnetron sputtering method on silicon substrates

Autor:	Katarzyna Nowakowska-Langier, Krzysztof Zdunek, Jan Szmidt, Piotr Firek, Michal Waskiewicz, Rafal Chodun
Rok vydání:	2019
Předmět:	Materials science Silicon chemistry Annealing (metallurgy) business.industry Optoelectronics chemistry.chemical_element Sputter deposition business Electronic properties
Zdroj:	Photonics Applications in Astronomy, Communications, Industry, and High-Energy Physics Experiments 2019.
DOI:	10.1117/12.2536649
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::de5e50e1d563a7a523012bd4ecc6e2b8 https://doi.org/10.1117/12.2536649 Zobrazit plný text záznamu