Reflection high‐energy electron diffraction observation of GaAs surface‐prepared ultrasonic running de‐ionized water treatment
| Autor: | Kiyomasa Sugii, Yoshikazu Homma, Yukihiro Hirota |
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| Rok vydání: | 1991 |
| Předmět: |
Surface (mathematics)
Materials science Reflection high-energy electron diffraction Physics and Astronomy (miscellaneous) Hydrogen business.industry chemistry.chemical_element Purified water Optics chemistry Electron diffraction Reflection (physics) Ultrasonic sensor Atomic physics business Surface reconstruction |
| Zdroj: | Applied Physics Letters. 58:2794-2796 |
| ISSN: | 1077-3118 0003-6951 |
| DOI: | 10.1063/1.104764 |
| Popis: | GaAs (001) surface ultrasonically cleaned under running de‐ionized water (U‐RDIW) is investigated by reflection high‐energy electron diffraction (RHEED). The RHEED observations of U‐RDIW‐treated surfaces show a spotty (1×1) pattern at room temperature and a (2×1) streaky surface reconstruction pattern at 360 °C. The experimental results indicate that chemically clean and damage‐free GaAs surfaces can be produced by U‐RDIW treatment. We discuss surface structures before/after heating using a hydrogen‐ terminated model. |
| Databáze: | OpenAIRE |
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