Test object for calibrating the transmission electron microscope
| Autor: | M. V. Koval’chuk, V. B. Mityukhlyaev, Yu. V. Ozerin, A. V. Rakov, V. V. Roddatis, V. P. Gavrilenko, M. N. Filippov, A. L. Vasil’ev, P. A. Todua |
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| Rok vydání: | 2013 |
| Předmět: |
Conventional transmission electron microscope
Materials science Microscope Silicon business.industry technology industry and agriculture chemistry.chemical_element Test object Condensed Matter Physics Electronic Optical and Magnetic Materials law.invention Optics Transmission (telecommunications) chemistry Transmission electron microscopy law Scanning transmission electron microscopy Materials Chemistry Electrical and Electronic Engineering Electron microscope business |
| Zdroj: | Russian Microelectronics. 42:155-159 |
| ISSN: | 1608-3415 1063-7397 |
| Popis: | A new test object for calibrating the transmission electron microscope and scanning transmission microscope is suggested. The test was fabricated by means of cutting the silicon relief structure with the attested sizes of relief elements, which allowed us to use it both in the range of large magnifications (with the direct observation of the crystal lattice) and in the range of medium (near 30000) magnifications. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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