White-light interferometer with partial correlogram scanning

Autor:	E. V. Sysoev
Rok vydání:	2007
Předmět:	White light interferometry Materials science business.industry Resolution (electron density) Condensed Matter Physics Laser law.invention Interferometry Optics law Phase noise Electrical and Electronic Engineering Thin film Photonics business Instrumentation Correlogram
Zdroj:	Optoelectronics, Instrumentation and Data Processing. 43:83-89
ISSN:	1934-7944 8756-6990
DOI:	10.3103/s8756699007010128
Popis:	A method for measurement of a surface microprofile with a nanometer resolution is described. The method is based on partial scanning of correlograms in a Linnik white-light interferometer. Experimental results on measurements of thin film thickness are presented. It is shown that a depth resolution of better than 1 nm can be obtained by correlogram scanning in the range from 1 to 2 periods.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::ddf8f18f8582568f68e7b4557551dd1a https://doi.org/10.3103/s8756699007010128 Zobrazit plný text záznamu Full text from SpringerLink