Atomic simulation of textured silicon carbide surface ultra-precision polishing

Autor:	Xiaosong Meng, Weilong Wu, Bokai Liao, Houfu Dai
Rok vydání:	2022
Předmět:	Process Chemistry and Technology Materials Chemistry Ceramics and Composites Surfaces Coatings and Films Electronic Optical and Magnetic Materials
Zdroj:	Ceramics International. 48:17034-17045
ISSN:	0272-8842
DOI:	10.1016/j.ceramint.2022.02.259
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::dde37ee53b2e21d1560c2ae26795ae45 https://doi.org/10.1016/j.ceramint.2022.02.259 Zobrazit plný text záznamu Full Text from ScienceDirect