Characterization of application-specific probes for SPMs

Autor: Michael D. Kirk, Marco Tortonese
Rok vydání: 1997
Předmět:
Zdroj: SPIE Proceedings.
ISSN: 0277-786X
DOI: 10.1117/12.271229
Popis: This paper addresses the problem of determining the absolute force constant of Atomic Force Microscope cantilevers. In the method presented, the cantilever under test is deflected against a reference cantilever of known spring constant. The relative deflection of the two cantilevers is related to their spring constants. The novelty of our approach is in the use of a micromachined reference cantilever of a precisely controlled force constant. Preliminary results show that our method is capable of measuring the force constant of cantilevers in the range of 0.1 to 10 N/m with an accuracy of better than 20%. The error is dominated by the non-linear effects in the force versus distance curves used for the measurement.
Databáze: OpenAIRE