Thermal processes during reactive sputtering of hot titanium target

Autor:	E A Minzhulina, V. I. Shapovalov, V. S. Levitskiy, A. V. Zav'aylov, V. V. Smirnov
Rok vydání:	2017
Předmět:	History Materials science chemistry Sputtering Metallurgy Thermal chemistry.chemical_element Computer Science Applications Education Titanium
Zdroj:	Journal of Physics: Conference Series. 857:012031
ISSN:	1742-6596 1742-6588
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::ddd67b436615f8a18d7a7658c952f565 https://doi.org/10.1088/1742-6596/857/1/012031 Zobrazit plný text záznamu