Autor: |
Rumen I. Tomov, Peter A. Atanasov, Valery S. Serbezov |
Rok vydání: |
1994 |
Předmět: |
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Zdroj: |
SPIE Proceedings. |
ISSN: |
0277-786X |
DOI: |
10.1117/12.195889 |
Popis: |
Superconducting Y1BaCu3O7 thin films were prepared by insitu oxygen plasma-assisted laser deposition. It was revealed that cw CO2 laser heating of substrate surface may be a method for reduction of particulate density. The buffer layers such as Ba(Sr)Ti03 and YSZ(1 1 1) were successfully experimented for preparation of good superconducting thin films. A multistep superfast CO2 laser annealing was investigated as a method of modification of the Y1BaCu3O7 thin films on Si. It is shown that N2 laser ablation may be a proper technique for patterning Y1BaCu3O7 thin films. The films were characterized by EDAX, SEM, XRD and Raman spectroscopy. 1. INTRODUCTIONThe discoveiy of high critical-temperature superconducting oxides13 has excited extraordinaiy research activity.One reason for these efforts lies in the possibility of growing epitaxial layers that are more appropriate for evaluating the basic physical properties and the fundamental interaction mechanisms responsible for the superconductivity in these oxides. |
Databáze: |
OpenAIRE |
Externí odkaz: |
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