Calibration method of silicon 〈111〉 orientation and its application in fabrication of silicon grating by anisotropic wet etching
| Autor: | 刘正坤 Liu Zheng-kun, 徐向东 Xu Xiang-dong, 邱克强 Qiu Ke-qiang, 梁榉曦 Liang Ju-xi, 洪义麟 Hong Yi-lin, 郑衍畅 Zheng Yan-chang |
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| Rok vydání: | 2018 |
| Předmět: |
Materials science
Fabrication Silicon business.industry chemistry.chemical_element 02 engineering and technology Grating Orientation (graph theory) 01 natural sciences Atomic and Molecular Physics and Optics Electronic Optical and Magnetic Materials 010309 optics 020210 optoelectronics & photonics chemistry 0103 physical sciences 0202 electrical engineering electronic engineering information engineering Calibration Optoelectronics business Anisotropy |
| Zdroj: | Optics and Precision Engineering. 26:1-7 |
| ISSN: | 1004-924X |
| DOI: | 10.3788/ope.20182601.0001 |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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