Plasma source ion carburizing of steel for improved wear resistance
Autor: | M. K. Lei, Z. L. Zhang |
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Rok vydání: | 1998 |
Předmět: | |
Zdroj: | Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films. 16:524-529 |
ISSN: | 1520-8559 0734-2101 |
Popis: | Plasma source ion carburizing is a low-temperature, low-pressure carburizing approach for improved wear resistance of steel with specific advantages over plasma carburizing and plasma source carbon ion implantation. A carburizing apparatus based on an electron cyclotron resonance (ECR) microwave plasma source has been developed. Carbon (as methane and hydrogen) ions are accelerated from the ECR plasma by a low-pulsed negative bias (typically −2 kV), which is applied directly to the sample, implanted, and are finally diffused into the steel at elevated temperatures that are regulated up to 550 °C by an auxiliary heater. Plasma source ion carburizing into pure iron and 35CrMo low alloy steel at a process temperature of 350 °C has been investigated. The carburized samples were characterized using Auger electron spectroscopy, electron probe microanalysis, microhardness measurement, and glancing incidence x-ray diffraction. Significant increases in microhardness have been observed on the carburized pure iron a... |
Databáze: | OpenAIRE |
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