Plasma source ion carburizing of steel for improved wear resistance

Autor:	M. K. Lei, Z. L. Zhang
Rok vydání:	1998
Předmět:	Auger electron spectroscopy Materials science Hydrogen Alloy steel Metallurgy chemistry.chemical_element Surfaces and Interfaces Plasma engineering.material Condensed Matter Physics Ion source Electron cyclotron resonance Surfaces Coatings and Films Carburizing Ion chemistry engineering
Zdroj:	Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films. 16:524-529
ISSN:	1520-8559 0734-2101
Popis:	Plasma source ion carburizing is a low-temperature, low-pressure carburizing approach for improved wear resistance of steel with specific advantages over plasma carburizing and plasma source carbon ion implantation. A carburizing apparatus based on an electron cyclotron resonance (ECR) microwave plasma source has been developed. Carbon (as methane and hydrogen) ions are accelerated from the ECR plasma by a low-pulsed negative bias (typically −2 kV), which is applied directly to the sample, implanted, and are finally diffused into the steel at elevated temperatures that are regulated up to 550 °C by an auxiliary heater. Plasma source ion carburizing into pure iron and 35CrMo low alloy steel at a process temperature of 350 °C has been investigated. The carburized samples were characterized using Auger electron spectroscopy, electron probe microanalysis, microhardness measurement, and glancing incidence x-ray diffraction. Significant increases in microhardness have been observed on the carburized pure iron a...
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::ddc9915bf7b8e2c2c80ce6c2c647a0e0 https://doi.org/10.1116/1.581071 Zobrazit plný text záznamu