Recent developments in interferometry for microsystems metrology
| Autor: | Nandigana K. Krishna Mohan, Pramod Rastogi |
|---|---|
| Rok vydání: | 2009 |
| Předmět: |
Engineering
White light interferometry business.industry Mechanical Engineering Atomic and Molecular Physics and Optics Interference microscopy Electronic Optical and Magnetic Materials Metrology Characterization (materials science) Interferometry Optics Electronic speckle pattern interferometry Microsystem Digital holographic microscopy Electrical and Electronic Engineering business |
| Zdroj: | Optics and Lasers in Engineering. 47:199-202 |
| ISSN: | 0143-8166 |
| DOI: | 10.1016/j.optlaseng.2008.08.009 |
| Popis: | Keywords: Digital Holographic Microscopy ; White-Light Interferometry ; Interference Microscopy ; Mems Characterization ; Tv-Holography ; Deformation ; System ; Shape ; Reconstruction ; Microelements Reference IMAC-ARTICLE-2009-013doi:10.1016/j.optlaseng.2008.08.009View record in Web of Science Record created on 2009-02-23, modified on 2016-08-08 |
| Databáze: | OpenAIRE |
| Externí odkaz: |
|
Full Text from ScienceDirect