Thermal stability of TaN, CrTaN, TaSiN, and CrTaSiN hard coatings in oxygen-containing atmospheres
| Autor: | Yung-I Chen, Kuo-Cheng Lin, Kun-Yi Lin, Hsiu-Hui Wang |
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| Rok vydání: | 2014 |
| Předmět: |
Materials science
Annealing (metallurgy) Surfaces and Interfaces General Chemistry Temperature cycling engineering.material Nitride Condensed Matter Physics Surfaces Coatings and Films Coating Residual stress Thermal Materials Chemistry engineering Surface roughness Thermal stability Composite material |
| Zdroj: | Surface and Coatings Technology. 259:159-166 |
| ISSN: | 0257-8972 |
| DOI: | 10.1016/j.surfcoat.2014.02.005 |
| Popis: | The feasibility of applying Ta-containing nitride protective coatings on glass molding dies was examined by conducting thermal cycling annealing. TaN, CrTaN, TaSiN, and CrTaSiN coatings are prepared by reactive co-sputtering. The thermal cycling annealing was performed at 270 °C and 600 °C in a 15-ppm O 2 –N 2 atmosphere, a realistic glass molding atmosphere for mass production. This study investigated variations in crystalline structure, surface oxide scale, mechanical properties, surface roughness, and residual coating stress after thermal cycling annealing up to 2000 cycles. The results indicated that the near-amorphous Cr 6 Ta 25 Si 11 N 58 coating exhibited a nanohardness of 19 GPa, a Young's modulus of 230–240 GPa, a surface roughness of 1 nm, and a consistent residual stress during the 2000 thermal cycles of annealing. The Cr 6 Ta 25 Si 11 N 58 coating is proposed as an appropriate coating for molding glass. |
| Databáze: | OpenAIRE |
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