12E-3 Channel-Select RF MEMS Filters Based on Self-Coupled AlN Contour-Mode Piezoelectric Resonators

Autor: Gianluca Piazza, Carlos R. Perez, Nipun Sinha, Rashed Mahameed, M. B. Pisani, Chengjie Zuo
Rok vydání: 2007
Předmět:
Zdroj: 2007 IEEE Ultrasonics Symposium Proceedings.
ISSN: 1051-0117
DOI: 10.1109/ultsym.2007.292
Popis: This paper reports experimental results on a new class of single-chip multi-frequency channel-select filters based on self-coupled aluminum nitride (AlN) contour-mode piezoelectric resonators. For the first time, two-port AlN contour- mode resonators are connected in series and electrically coupled using their intrinsic capacitance to form multi-frequency (94 -271 MHz), narrow bandwidth (~ .3%), low insertion loss (~4 dB), high off-band rejection (~60 dB) and extremely linear (IIP3-110 dBm) channel-select filters. This novel technology enables multi-frequency, high-performance and small form factor filter arrays and makes a single-chip multi-band RF solution possible in the near future.
Databáze: OpenAIRE